An edition of Accurate linewidth measurements on integrated-circuit photomasks (1980)

Accurate linewidth measurements on integrated-circuit photomasks

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Accurate linewidth measurements on integrated ...
John M. Jerke, John M. Jerke
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Last edited by MARC Bot
November 15, 2023 | History
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An edition of Accurate linewidth measurements on integrated-circuit photomasks (1980)

Accurate linewidth measurements on integrated-circuit photomasks

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Publish Date
Publisher
Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Language
English

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Subjects

Integrated circuits, Masks, Optical measurements

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Edition Availability
Cover of: Accurate linewidth measurements on integrated-circuit photomasks
Accurate linewidth measurements on integrated-circuit photomasks
1980, Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
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Book Details

Edition Notes

This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards.

Issued Feb. 1980.

CODEN: XNBSAV.

Includes bibliographical references.

Published in
Washington
Series
Semiconductor measurement technology, NBS special publication -- 400-43

ID Numbers

Open Library
OL49941081M
OCLC/WorldCat
5970600

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