An edition of Sub-Half-Micron Lithography for ULSIs (2005)

Sub-Half-Micron Lithography for ULSIs

New Ed edition

by and

Cover of: Sub-Half-Micron Lithography for ULSIs by Katsumi Suzuki, Shinji Matsui
Not in Library

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by ImportBot
October 4, 2021 | History
Edit
An edition of Sub-Half-Micron Lithography for ULSIs (2005)

Sub-Half-Micron Lithography for ULSIs

New Ed edition

by and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Cambridge University Press
Language
English
Pages
341

Check nearby libraries

Buy this book

Subjects

Microlithography, Integrated circuits, ultra large scale integration, Printed circuits

Showing 1 featured edition. View all 1 editions?

Edition Availability
Cover of: Sub-Half-Micron Lithography for ULSIs
Sub-Half-Micron Lithography for ULSIs
November 10, 2005, Cambridge University Press
Paperback in English - New Ed edition
  • Not in Library
Libraries near you: WorldCat

Add another edition?

Book Details

First Sentence

"The first commercial 0.25- m technology was distributed to users in 1997, and is now widely used in advanced ULSIs (e.g. 64-Mb and 256-Mb DRAMs, high-end microprocessors, and ASICs)."

Classifications

Library of Congress
TK7874.76 .S83 2000

The Physical Object

Format
Paperback
Number of pages
341
Dimensions
9.6 x 7.4 x 0.9 inches
Weight
1.2 pounds

ID Numbers

Open Library
OL7713903M
ISBN 10
0521022347
ISBN 13
9780521022347
OCLC/WorldCat
137771867
Goodreads
6187755

Source records

Better World Books record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
October 4, 2021 Created by ImportBot import existing book