An edition of EUV sources for lithography (2006)

EUV sources for lithography

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Cover of: EUV sources for lithography by Vivek Bakshi
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Last edited by MARC Bot
June 26, 2019 | History
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An edition of EUV sources for lithography (2006)

EUV sources for lithography

by

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Publish Date
Publisher
SPIE Press
Language
English
Pages
1057

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Previews available in: English

Subjects

Plasma (Ionized gases), Lithography, Ultraviolet radiation, Industrial applications, Extreme ultraviolet lithography

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Edition Availability
Cover of: EUV Sources for Lithography
EUV Sources for Lithography
2006, SPIE
in English
Libraries near you: WorldCat
Cover of: EUV sources for lithography
EUV sources for lithography
2006, SPIE Press
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: EUV Sources for Lithography
EUV Sources for Lithography
2006, SPIE
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Published in
Bellingham, WA

Classifications

Library of Congress
QC

The Physical Object

Pagination
xxxv, 1057 p. :
Number of pages
1057

ID Numbers

Open Library
OL22736349M
Internet Archive
euvsourcesforlit00baks
ISBN 10
0819458457
Library Thing
2683767
Goodreads
2403620

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Internet Archive item record

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June 26, 2019 Created by MARC Bot import existing book