An edition of Alternative lithographic technologies II (2010)

Alternative lithographic technologies II

23-25 February 2010, San Jose, California, United States

by

Alternative lithographic technologies II
Daniel J. C. Herr, Daniel J. C ...
Locate

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by ImportBot
December 1, 2010 | History
Edit
An edition of Alternative lithographic technologies II (2010)

Alternative lithographic technologies II

23-25 February 2010, San Jose, California, United States

by

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English

Check nearby libraries

Buy this book

Subjects

Electron beam Lithography, Congresses, Microlithography, Masks (Electronics), Industrial applications, Extreme ultraviolet lithography
Edition Availability
Cover of: Alternative lithographic technologies II
Alternative lithographic technologies II: 23-25 February 2010, San Jose, California, United States
2010, SPIE
in English

Add another edition?

Book Details

Edition Notes

Includes bibliographical references.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 7637, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7637.
Other Titles
Alternative lithographic technologies 2, Alternative lithographic technologies two

Classifications

Library of Congress
TK7872.M3 A482 2010

The Physical Object

Pagination
1 v. (various pagings) :

ID Numbers

Open Library
OL24482937M
ISBN 10
0819480517
ISBN 13
9780819480514
LCCN
2010459490
OCLC/WorldCat
659783697

Source records

Library of Congress MARC record
Library of Congress MARC record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
December 1, 2010 Created by ImportBot initial import