An edition of EUV lithography (2007)

EUV lithography

by

  • 1 Want to read
Cover of: EUV lithography by Vivek Bakshi, Vivek Bakshi
Not in Library

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
  • 1 Want to read
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
December 15, 2022 | History
Edit
An edition of EUV lithography (2007)

EUV lithography

by

  • 1 Want to read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English

Check nearby libraries

Buy this book

Previews available in: English

Subjects

Ultraviolet radiation, Industrial applications, Optical coatings, Photolithography, Optics, Rayonnement ultraviolet, Applications industrielles, Photolithographie, Revêtements optiques

Showing 3 featured editions. View all 3 editions?

Edition Availability
Cover of: Euv Lithography
Euv Lithography
Feb 08, 2018, Society of Photo Optical
hardcover
Libraries near you: WorldCat
Cover of: EUV Lithography
EUV Lithography
2008, Wiley & Sons, Incorporated, John
in English
Libraries near you: WorldCat
Cover of: EUV lithography
EUV lithography
2007, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Published in
Bellingham, Wash
Series
Press monograph -- 136

Classifications

Dewey Decimal Class
621.3815
Library of Congress
QC459 .B35 2007, QC459 .E98 2009

The Physical Object

Pagination
p. cm.

ID Numbers

Open Library
OL16819819M
Internet Archive
euvlithographysp00baks
ISBN 13
9780819469649
LCCN
2008018045
OCLC/WorldCat
226308133
Goodreads
5403474

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Internet Archive item record
Library of Congress MARC record
marc_columbia MARC record
harvard_bibliographic_metadata record
amazon.com record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
December 15, 2022 Edited by MARC Bot import existing book
February 27, 2022 Edited by ImportBot import existing book
December 20, 2020 Edited by MARC Bot import existing book
January 21, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page