| Record ID | marc_records_scriblio_net/part26.dat:134698565:937 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part26.dat:134698565:937?format=raw |
LEADER: 00937pam 2200253 a 4500
001 97027288
003 DLC
005 19971217074240.1
008 970703s1997 gw a b 001 0 eng
010 $a 97027288
020 $a3540631828 (Berlin : acid-free paper)
040 $aDLC$cDLC$dDLC
050 00 $aTK7874.76$b.H67 1997
082 00 $a621.3815/284$221
100 1 $aHori, Takashi,$d1956-
245 10 $aGate dielectrics and MOS ULSIs :$bprinciples, technologies, and applications /$cTakashi Hori.
260 $aBerlin ;$aNew York :$bSpringer,$cc1997.
300 $axiv, 352 p. :$bill. ;$c24 cm.
440 0 $aSpringer series in electronics and photonics,$x0172-5734 ;$vv. 34
504 $aIncludes bibliographical references (p. 325-341) and index.
650 0 $aIntegrated circuits$xUltra large scale integration.
650 0 $aDielectric devices.
650 0 $aMetal oxide semiconductors.
650 0 $aSilicon-on-insulator technology.