| Record ID | ia:nondestructiveev4703unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/nondestructiveev4703unse/nondestructiveev4703unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/nondestructiveev4703unse/nondestructiveev4703unse_meta.mrc |
LEADER: 01470cam a22003494a 4500
001 2002726813
003 DLC
005 20050722093324.0
008 021212s2002 waua 101 0 eng d
010 $a 2002726813
035 $a(OCoLC)ocm50326042
040 $aCUS$cCUS$dDLC
042 $alccopycat
020 $a0819444510
050 00 $aTA418.9.N35$bN66 2002
082 00 $a620/.5$222
245 00 $aNondestructive evaluation and reliability of micro- and nanomaterial systems :$b18-19 March 2002, Newport Beach, USA /$cNorbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash., USA :$bSPIE,$cc2002.
300 $aix, 228 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series,$x0277-786X ;$vv. 4703
504 $aIncludes bibliographical references and index.
650 0 $aNanostructured materials$xTesting$vCongresses.
650 0 $aMicroelectromechanical systems$xEvaluation.
650 0 $aMicroelectromechanical systems$xReliability.
650 0 $aNondestructive testing$vCongresses.
650 0 $aSurfaces (Technology)$vCongresses.
650 0 $aQuality control$vCongresses.
700 1 $aMeyendorf, Norbert.
700 1 $aBaaklini, George Y.
700 1 $aMichel, Bernd.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4703.