An edition of Scanning probe lithography (2001)

Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)

1 edition

by , , and

Cover of: Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems) by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate, Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Scanning probe lithography (2001)

Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)

1 edition

by , , and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Springer
Language
English
Pages
228

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Subjects

Design and construction, Integrated circuits, Microlithography, Scanning probe microscopy, Semi-conductors & super-conductors, Engineering - Electrical & Electronic, Technology, Microelectronics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - Printed, Material Science, Technology / Electronics / Circuits / General, Technology / Electronics / Circuits / Printed, Technology : Engineering - Electrical & Electronic, Technology : Material Science, Electronics - Circuits - Integrated, Electronics - Microelectronics, Microscopy
Edition Availability
Cover of: Scanning probe lithography
Scanning probe lithography
2001, Kluwer Academic Publishers
in English
Cover of: Scanning probe lithography
Scanning probe lithography
2001, Kluwer Academic Publishers
in English
Cover of: Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
June 30, 2001, Springer
Hardcover in English - 1 edition

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Book Details

First Sentence

"Semiconductor lithography is the patterning process used to define the structures that make up integrated circuits (ICs)."

The Physical Object

Format
Hardcover
Number of pages
228
Dimensions
9.5 x 6.4 x 0.7 inches
Weight
12.8 ounces

ID Numbers

Open Library
OL7809627M
ISBN 10
0792373618
ISBN 13
9780792373612
Goodreads
5613327

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL8362357W
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 29, 2008 Created by an anonymous user Imported from amazon.com record